F-theta group presents the series 167L, a telecentric scan lens optimized for either 355 or 1,064 nm. Both offer a maximum beam diameter of 10+ mm and the scan area of 60 mm x 60 mm. The focus spot variation across the entire scan field is well below 10%. A focus spot size of approximately 10 µm for the 355 nm and approximately 20 µm for the 1,064 nm lens can be achieved assuming a 1/e⊃2; beam diameter.