266nm laser beam expander is a precision optical component specifically designed for deep ultraviolet (DUV) Nd:YAG lasers, widely used in demanding applications such as high-precision laser processing, semiconductor manufacturing, and scientific research. This product series employs a Galilean air-spaced lens configuration, effectively eliminating the potential damage issues associated with cemented lenses under high-energy DUV conditions.

Key Advantages

Optimized for the 266nm wavelength, this beam expander series utilizes high-quality synthetic fused silica substrates combined with high-performance V-coat anti-reflection coatings, achieving nominal transmission rates exceeding 98.5%. The optical design delivers λ/10 transmitted wavefront error (for a 4mm input beam), ensuring near-perfect collimated beam quality under demanding DUV conditions. Select high-end models incorporate a diopter adjustment function, allowing users to fine-tune the collimation of the output beam to accommodate varying working distances or optical system configurations.

Applications

The 266nm DUV laser, characterized by its short wavelength and high photon energy, enables sub-micron to nanometer-scale ultra-fine processing. The beam expander plays a critical role in such systems, expanding the laser beam diameter and reducing divergence to provide a well-collimated beam for subsequent focusing or scanning optics. Typical applications include: high-density PCB/FPC microvia drilling, semiconductor wafer dicing and scribing, liquid crystal display (LCD) repair, fiber Bragg grating inscription, and the fabrication of advanced micro/nano structures such as photonic crystals.

Technical Specifications

To meet the rigorous demands of high-power DUV lasers, 266nm beam expanders feature specialized material and structural designs. The core optical elements are made of DUV-resistant fused silica, and the mechanical housing is typically constructed from black anodized aluminum for a compact and lightweight design. Input/output interfaces are generally standard metric threads (e.g., M30x1, M34x0.5), enabling seamless integration with existing laser processing systems. When selecting a product, careful attention should be paid to its laser damage threshold specification to ensure long-term reliable operation under high-energy fluence conditions.